Damage-free failure/defect analysis in electronics and semiconductor industries using micro-ATR FTIR imaging
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چکیده
The electronics and semiconductor industries rely heavily on failure and defect analysis to maximize productivity and minimize expensive downtime. As technology improves, manufactured devices get smaller and the processes used to make them become more intricate. Costly downtime associated with the presence of particulate and chemical contamination becomes more critical to a successful manufacturing operation. Any contamination requires the manufacturing process to stop while the defect is accurately and reliably characterized, the source identifi ed, and the problem remedied. Minimizing the time needed to complete this process can quite literally save millions of dollars. Damage-free failure/defect analysis in electronics and semiconductor industries using micro-ATR FTIR imaging
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